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Correlative Microscopy and Nanofabrication with AFM Integrated with SEM

  • Mathias Holz (a1), Christoph Reuter (a1), Ahmad Ahmad (a1), Alexander Reum (a1), Martin Hofmann (a2), Tzvetan Ivanov (a2) and Ivo W. Rangelow (a2)...

Abstract

This article describes an atomic force microscope (AFM) that can operate in any scanning electron microscope (SEM) or SEM combined with a focused ion-beam (FIB) column. The combination of AFM, SEM imaging, energy-dispersive X-ray spectrometry (EDX), FIB milling, and nanofabrication methods (field-emission scanning probe lithography, tip-based electron beam induced deposition, and nanomachining) provides a new tool for correlative nanofabrication and microscopy. Piezoresistive, thermo-mechanically actuated cantilevers (active cantilevers) are used for fast imaging and nanofabrication. Thus, the AFM with active cantilevers integrated into an SEM (AFMinSEM) can generate and characterize nanostructures in situ without breaking vacuum or contaminating the sample.

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References

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[1]Rosolen, GC and Welland, ME, Rev Sci Instrum 63(9) (1992) 4041–45.10.1063/1.1143262
[2]Rangelow, IW et al. , J Vac Sci Technol B 35 (2017) 06G101.10.1116/1.4992073
[3]Rangelow, IW et al. , Device and method for mask-less AFM microlithography, U.S. patent 7,141,808 (2005).
[4]Rangelow, IW et al. , J Vac Sci Technol B 36 (2018) 06J102.10.1116/1.5048524
[5]Rangelow, IW et al. , Microelectron Eng 23 (1994) 365–68.10.1016/0167-9317(94)90174-0
[6]Pedrak, R et al. , JVST (b) 21N60, Nov/Dec (2003) 3102–07.
[7]US8689359 (B2) 2014-04-01; DE102017202455 (A1) 2018-08-16; US8312561B2 2012-10-13.
[8]Rangelow, IW et al. , J Vac Sci Technol B 16 (1998) 3185.10.1116/1.590348
[9]Hertz, H, Journal für die reine und angewandte Mathematik 92 (1881) 156–71.
[10]Villarubia, JS, J Res Natl Inst Stand Technol 102 (1997) 425.10.6028/jres.102.030
[11]Jee, AY and Lee, M, Polym Test 29(1) (2010), pp. 9599.
[12]Hofmann, M et al. , J Vac Sci Technol B 36 (2018) 06JL02.10.1116/1.5048193
[13]Donald, M in Nanotechnology, ed. Timp, Gregory, Springer, New York, 1999, p. 164.
[14]Kaestner, M, PhD. Thesis, 2017, Technische Universität Ilmenau; and M Holz et al., “Tip-based electron beam induced deposition using active cantilevers, ” JVST (b) (2019 in press).
[15]Idea of Lab in SEM has been proposed by Cornelis W Hagen, Delft University of Technology, Delft, Holland.
[16]Neirynck, JM et al. , J Electrochem Soc 146(4) (1999) 1602–07, S0013-4651(98)07-092-X.10.1149/1.1391812
[17]Holz, M, et al. , Proc SPIE 10959 (2019) 1095929.

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Correlative Microscopy and Nanofabrication with AFM Integrated with SEM

  • Mathias Holz (a1), Christoph Reuter (a1), Ahmad Ahmad (a1), Alexander Reum (a1), Martin Hofmann (a2), Tzvetan Ivanov (a2) and Ivo W. Rangelow (a2)...

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