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ZEISS ORION NanoFab: New SIMS Spectrometer

Published online by Cambridge University Press:  05 August 2019

John Notte ,
Doug Runt ,
Fouzia Khanom ,
Brett Lewis ,
Sybren Sijbrandij ,
Christelle Guillermier  and
David Dowsett
John Notte*
Affiliation:
Carl Zeiss SMT, Inc. PCS Integration Center, Peabody, MA, USA.
Doug Runt
Affiliation:
Carl Zeiss SMT, Inc. PCS Integration Center, Peabody, MA, USA.
Fouzia Khanom
Affiliation:
Carl Zeiss SMT, Inc. PCS Integration Center, Peabody, MA, USA.
Brett Lewis
Affiliation:
Carl Zeiss SMT, Inc. PCS Integration Center, Peabody, MA, USA.
Sybren Sijbrandij
Affiliation:
Carl Zeiss SMT, Inc. PCS Integration Center, Peabody, MA, USA.
Christelle Guillermier
Affiliation:
Carl Zeiss SMT, Inc. PCS Integration Center, Peabody, MA, USA.
David Dowsett
Affiliation:
Lion Nano-Systems, Technoport 2, Foetz, Luxembourg.
*
*Corresponding author: John.Notte@Zeiss.com

Abstract

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Type
Vendor Symposium
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 526 - 527
Copyright
Copyright © Microscopy Society of America 2019 

References

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