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X-Ray Energy Dispersive Spectroscopy in the Environmental Scanning Electron Microscope

Published online by Cambridge University Press:  02 July 2020

John F. Mansfield  and
Brett L. Pennington
John F. Mansfield
Affiliation:
North Campus Electron Microbeam Analysis Laboratory 417 SRB, University of Michigan, 2455 Hayward, Ann Arbor, MI 48109-2143 http://emalwww.engin.umich.edu/people/jfmjfm/
Brett L. Pennington
Affiliation:
North Campus Electron Microbeam Analysis Laboratory 417 SRB, University of Michigan, 2455 Hayward, Ann Arbor, MI 48109-2143 http://emalwww.engin.umich.edu/people/jfmjfm/
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Extract

The environmental scanning electron microscope (Environmental SEM) has proved to be a powerful tool in both materials science and the life sciences. Full characterization of materials in the environmental SEM often requires chemical analysis by X-ray energy dispersive spectroscopy (XEDS). However, the spatial resolution of the XEDS signal can be severely degraded by the gaseous environment in the sample chamber. At an operating pressure of 5Torr a significant fraction of the primary electron beam is scattered after it passes through the final pressure limiting aperture and before it strikes the sample. Bolon and Griffin have both published data that illustrates this effect very well. Bolon revealed that 45% of the primary electron beam was scattered by more than 25 μm in an Environmental SEM operating at an accelerating voltage of 30kV, with a water vapor pressure of 3Torr and a working distance of 15mm.

Type
30 Years of Energy Dispersive Spectrometry in Microanalysis
Information
Microscopy and Microanalysis , Volume 4 , Issue S2: Proceedings: Microscopy & Microanalysis '98, Microscopy Society of America 56th Annual Meeting, Microbeam Analysis Society 32nd Annual Meeting, Atlanta, Georgia July 12-16, 1998 , July 1998 , pp. 182 - 183
Copyright
Copyright © Microscopy Society of America

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References

1Bolon, R.B., Microbeam Analysis (Ed. Howitt, D.G., San Francisco Press), 1991, 199.Google Scholar
2Griffin, B.J., Proc. 50th EMSA, 1992, 1324.CrossRefGoogle Scholar
3Doehne, E., "A new correction method for energy-dispersive spectrosoy analysis under humid conditions", Scanning, Vol 18, 3 (1996), 164.Google Scholar
4Doehne, E., "A new correction method for high-resolution energy-dispersive x-ray analyses in the environmental scanning electron microscope", Scanning, Vol 19, 2 (1997), 75.CrossRefGoogle Scholar
5Horsewell, A., Appel, C. & Bilde-Sorensen, J.B., "Leaky Vacuum SEM for Materials Scientists", Microscopy & Microanalysis 1996, San Francisco Press, 1996, 846.Google Scholar
6Bilde-Sorensen, J.B. & Appel, C., "Improvement of the Spatial Resolution of XEDS in the Environmental SEM", EUREM 1996, 11th European Congress on EM, Dublin, Ireland, on CD-ROM.Google Scholar
7Danilatos, G.D., Advances in Electronics and Electron Physics, 78 (1990) 1.CrossRefGoogle Scholar
8Nockolds, C.E., Microbeam Analysis, (1987) 9.Google Scholar
9Griffin, B.J. and Nockolds, C.E., Scanning 13 (1991) 307.CrossRefGoogle Scholar
10Griffin, B.J. and Nockolds, C.E., Microscopy & Microanalysis 1996, (1996) 842.Google Scholar
11Bache, I.C., Kitching, S., Thiel, B.L. & Donald, A.M., "Variations in the Probe Beam Broadening with Operating Conditions in ESEM: Monte-Carlo Simulations and EDX Measurements", Microscopy & Microanalysis 3, Supplement 2, (1997) 1211.CrossRefGoogle Scholar