Xe+ FIB Milling and Measurement of Amorphous Silicon Damage

R.D. Kelley; K. Song; B. Van Leer; D. Wall; L. Kwakman

doi:10.1017/S1431927613006302

Abstract

Core share and HTML view are not available for this content. However, as you have access to this content, a full PDF is available via the ‘Save PDF’ action button.

Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Crossref Citations

This article has been cited by the following publications. This list is generated based on data provided by Crossref.

Bassim, Nabil Scott, Keana and Giannuzzi, Lucille A. 2014. Recent advances in focused ion beam technology and applications. MRS Bulletin, Vol. 39, Issue. 4, p. 317.

Kono, Genki Fujino, Masahisa Yamashita, Daiji Watanabe, Kentaroh Sugiyama, Masakazu Nakano, Yoshiaki and Suga, Tadatomo 2015. Effect of ion species for the surface activated bonding of GaAs wafers on the characteristics of the bonded interfaces. p. 478.

Giannuzzi, Lucille A. Yu, Zhiyang Yin, Denise Harmer, Martin P. Xu, Qiang Smith, Noel S. Chan, Lisa Hiller, Jon Hess, Dustin and Clark, Trevor 2015. Theory and New Applications ofEx SituLift Out. Microscopy and Microanalysis, Vol. 21, Issue. 4, p. 1034.

Burnett, T.L. Kelley, R. Winiarski, B. Contreras, L. Daly, M. Gholinia, A. Burke, M.G. and Withers, P.J. 2016. Large volume serial section tomography by Xe Plasma FIB dual beam microscopy. Ultramicroscopy, Vol. 161, Issue. , p. 119.

Bischoff, Lothar Mazarov, Paul Bruchhaus, Lars and Gierak, Jacques 2016. Liquid metal alloy ion sources—An alternative for focussed ion beam technology. Applied Physics Reviews, Vol. 3, Issue. 2, p. 021101.

Bruchhaus, L. Mazarov, P. Bischoff, L. Gierak, J. Wieck, A. D. and Hövel, H. 2017. Comparison of technologies for nano device prototyping with a special focus on ion beams: A review. Applied Physics Reviews, Vol. 4, Issue. 1,

Kosasih, Felix Utama and Ducati, Caterina 2018. Characterising degradation of perovskite solar cells through in-situ and operando electron microscopy. Nano Energy, Vol. 47, Issue. , p. 243.

Campin, M.J. Bonifacio, C.S. and Fischione, P.E. 2018. Low-Energy Argon Broad Ion Beam and Narrow Ion Beam Milling of In Situ Lift-Out FIB Specimens. Microscopy and Microanalysis, Vol. 24, Issue. S1, p. 862.

Musiienko, Denys Straka, Ladislav Klimša, Ladislav Saren, Andrey Sozinov, Alexei Heczko, Oleg and Ullakko, Kari 2018. Giant magnetic-field-induced strain in Ni-Mn-Ga micropillars. Scripta Materialia, Vol. 150, Issue. , p. 173.

Moll, Philip J.W. 2018. Focused Ion Beam Microstructuring of Quantum Matter. Annual Review of Condensed Matter Physics, Vol. 9, Issue. 1, p. 147.

Smith, A.D. Donoghue, J. Garner, A. Winiarski, B. Bousser, E. Carr, J. Behnsen, J. Burnett, T.L. Wheeler, R. Wilford, K. Withers, P.J. and Preuss, M. 2019. On the Application of Xe+ Plasma FIB for Micro-fabrication of Small-scale Tensile Specimens. Experimental Mechanics, Vol. 59, Issue. 8, p. 1113.

Chen, W.Q. Xiao, X.Z. Pang, B. Si, S.S. Jia, Y.Z. Xu, B. Morgan, T.W. Liu, W. and Chiu, Y.L. 2019. Irradiation hardening induced by blistering in tungsten due to low-energy high flux hydrogen plasma exposure. Journal of Nuclear Materials, Vol. 522, Issue. , p. 11.

Halpin, J.E. Webster, R.W.H. Gardner, H. Moody, M.P. Bagot, P.A.J. and MacLaren, D.A. 2019. An in-situ approach for preparing atom probe tomography specimens by xenon plasma-focussed ion beam. Ultramicroscopy, Vol. 202, Issue. , p. 121.

Park, Chris Avishai, Amir Pan, David Lewis, Brett and Buxbaum, Alex 2019. Microelectronics Failure Analysis. p. 335.

Binkley, Dakota M. Deering, Joseph Yuan, Hui Gourrier, Aurélien and Grandfield, Kathryn 2020. Ellipsoidal mesoscale mineralization pattern in human cortical bone revealed in 3D by plasma focused ion beam serial sectioning. Journal of Structural Biology, Vol. 212, Issue. 2, p. 107615.

van Leer, Brandon and Casalena, Lee 2020. O+ PFIB Milling and Measurement of FIB Damage in Silicon. Microscopy and Microanalysis, Vol. 26, Issue. S2, p. 414.

Chen, W.Q. Wang, X.Y. Li, K.L. Wang, Y.N. Morgan, T.W. Xu, B. Chiu, Y.L. and Liu, W. 2020. Nucleation mechanism of intra-granular blisters in tungsten exposed to hydrogen plasma. Scripta Materialia, Vol. 187, Issue. , p. 243.

Chen, W.Q. Wang, X.Y. Chiu, Y.L. Morgan, T.W. Guo, W.G. Li, K.L. Yuan, Y. Xu, B. and Liu, W. 2020. Growth mechanism of subsurface hydrogen cavities in tungsten exposed to low-energy high-flux hydrogen plasma. Acta Materialia, Vol. 193, Issue. , p. 19.

Smith, Albert D. Donoghue, Jack M. Garner, Alistair J. W. Lunt, David Harte, Allan Wilford, Keith Withers, Philip J. and Preuss, Michael 2020. Novel Methods for Recording Stress-Strain Curves in Proton Irradiated Material. Scientific Reports, Vol. 10, Issue. 1,

ROBERTSON, STUART DOAK, SCOTT SUN, FU‐LONG LIU, ZHI‐QUAN LIU, CHANGQING and ZHOU, ZHAOXIA 2020. Focused ion beam preparation of microbeams for in situ mechanical analysis of electroplated nanotwinned copper with probe type indenters. Journal of Microscopy, Vol. 279, Issue. 3, p. 212.

Download full list

Article contents

Xe+ FIB Milling and Measurement of Amorphous Silicon Damage

Abstract

Save article to Kindle

Save article to Dropbox

Save article to Google Drive

Reply to: Submit a response

Your details

You have entered the maximum number of contributors

Conflicting interests