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Visualization of Anitimony (Sb) Dopant Clusters in Silicon Specimen by Large Angle Convergent Beam HAADF-STEM

Published online by Cambridge University Press:  01 August 2010

S Kim ,
Y Oshima ,
H Sawada ,
N Hashikawa ,
K Asayama ,
Y Kondo ,
Y Tanishiro  and
K Takayanagi
S Kim
Affiliation:
Tokyo Institute of Technology, Japan
Y Oshima
Affiliation:
JST, CREST, Japan
H Sawada
Affiliation:
Tokyo Institute of Technology, Japan
N Hashikawa
Affiliation:
Renesas Technology Corp, Japan
K Asayama
Affiliation:
Renesas Technology Corp, Japan
Y Kondo
Affiliation:
Tokyo Institute of Technology, Japan
Y Tanishiro
Affiliation:
Tokyo Institute of Technology, Japan
K Takayanagi
Affiliation:
Tokyo Institute of Technology, Japan

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 16 , Supplement S2 , July 2010 , pp. 1732 - 1733
Copyright
Copyright © Microscopy Society of America 2010