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Using the Electron Microscope to Explore Reliability in Microelectromechanical Systems and Nanostructured Materials

  • E A Stach (a1), Vidyut Gopal (a1), Miao Jin (a1), Daan Hein Alsem (a1), Mark J. Williamson (a1), Andrew Minor (a1), Velimir R Radmilovic (a1), Christopher L. Muhlstein (a2), J. W. Morris (a1) and Robert O. Ritchie (a1)...

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Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

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Using the Electron Microscope to Explore Reliability in Microelectromechanical Systems and Nanostructured Materials

  • E A Stach (a1), Vidyut Gopal (a1), Miao Jin (a1), Daan Hein Alsem (a1), Mark J. Williamson (a1), Andrew Minor (a1), Velimir R Radmilovic (a1), Christopher L. Muhlstein (a2), J. W. Morris (a1) and Robert O. Ritchie (a1)...

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