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Using GPGPU techniques for Scanning Electron Microscope autofocusing

Published online by Cambridge University Press:  23 November 2012

N.H. Caldwell ,
M. Li ,
B.C. Breton  and
D.M. Holburn
N.H. Caldwell
Affiliation:
Department of Engineering, University of Cambridge, Cambridge, United Kingdom
M. Li
Affiliation:
Department of Engineering, University of Cambridge, Cambridge, United Kingdom
B.C. Breton
Affiliation:
Department of Engineering, University of Cambridge, Cambridge, United Kingdom
D.M. Holburn
Affiliation:
Department of Engineering, University of Cambridge, Cambridge, United Kingdom
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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 18 , Issue S2: Proceedings of Microscopy & Microanalysis 2012 , July 2012 , pp. 1210 - 1211
Copyright
Copyright © Microscopy Society of America 2012

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