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Three-dimensional Nanostructure Fabrication by Focused-ion-beam Chemical-vapor-deposition

Published online by Cambridge University Press:  31 July 2006

S Matsui
S Matsui
Affiliation:
University of Hyogo,Japan
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 12 , Issue S02 , August 2006 , pp. 130 - 131
Copyright
© 2006 Microscopy Society of America

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