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Three-Dimensional Nanostructure Determination Based On Scanning Electron Nanodiffraction

Published online by Cambridge University Press:  25 July 2016

Yifei Meng  and
Jian-Min Zuo
Yifei Meng
Affiliation:
Department of Materials Science & Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois, USA Fredrick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, Illinois, USA
Jian-Min Zuo
Affiliation:
Department of Materials Science & Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois, USA Fredrick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, Illinois, USA

Abstract

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Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 498 - 499
Copyright
© Microscopy Society of America 2016 

References

References:

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[8] We thank Prof. Huang of National Tsinghua University for providing the TiN sample. We thank Dr. Mao and Prof. Dillon of University of Illinois at Urbana-Champaign for providing the design of the tomography holder. This work is supported by U.S. Department of Energy under contract DEFG02-01ER45923.Google Scholar