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Templated Growth of Semiconductor Nanostructures through Block Copolymer Lithography

Published online by Cambridge University Press:  31 July 2006

L Denault
Affiliation:
GE Global Research
R Klinger
Affiliation:
GE Global Research
ST Taylor
Affiliation:
GE Global Research
A Alizadeh
Affiliation:
GE Global Research
C Keimel
Affiliation:
GE Global Research
D Hays
Affiliation:
GE Global Research
K Krishnan
Affiliation:
GE Global Research
F Sharifi
Affiliation:
GE Global Research
K Conway
Affiliation:
GE Global Research
J Grande
Affiliation:
GE Global Research
A Stintz
Affiliation:
University of New Mexico
S Krishna
Affiliation:
University of New Mexico
E Braunstein
Affiliation:
Lockheed Martin
C Jones
Affiliation:
Lockheed Martin

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2005

Type
Abstract
Copyright
© 2006 Microscopy Society of America