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TEM investigation of sputtered and epitaxial grown indium oxide layers for ozone sensors

Published online by Cambridge University Press:  07 September 2007

T Kups ,
C Wang ,
M Gubisch ,
L Spiess  and
O Ambacher
T Kups
Affiliation:
Technical University Ilmenau,Germany
C Wang
Affiliation:
Technical University Ilmenau,Germany
M Gubisch
Affiliation:
Technical University Ilmenau,Germany
L Spiess
Affiliation:
Technical University Ilmenau,Germany
O Ambacher
Affiliation:
Technical University Ilmenau,Germany
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Extract

Extended abstract of a paper presented at MC 2007, 33rd DGE Conference in Saarbrücken, Germany, September 2 – September 7, 2007

Type
Research Article
Information
Microscopy and Microanalysis , Volume 13 , Issue S03 , September 2007 , pp. 406 - 407
Copyright
Copyright © Microscopy Society of America 2007

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