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Sub-nanometer Resolution in Field-free Imaging using a Titan 80-300 with Lorentz lens and Image Cs-Corrector at 300kV Acceleration Voltage

Published online by Cambridge University Press:  26 July 2009

B Freitag
Affiliation:
FEI Company,Netherlands
M Bischoff
Affiliation:
FEI Company,Netherlands
H Mueller
Affiliation:
CEOS GmbH,Germany
P Hartel
Affiliation:
CEOS GmbH,Germany
HS von Harrach
Affiliation:
FEI Company,Netherlands

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Copyright
Copyright © Microscopy Society of America 2009