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Structure of Ru/Pt Nanocomposite Films Fabricated by Plasma-Enhanced Atomic Layer Depositions

Published online by Cambridge University Press:  23 September 2015

Masahiro Kawasaki ,
Chien-Nan Hsiao ,
Jer-Ren Yang  and
Makoto Shiojiri
Masahiro Kawasaki
Affiliation:
JEOL USA Inc., 11 Dearborn Road, Peabody, MA 01960, USA
Chien-Nan Hsiao
Affiliation:
National Applied Research Laboratories, Instrument Technology Research Center, 20, R&D Rd. VI, Hsinchu Science Park, Hsinchu, 30076, Taiwan, ROC
Jer-Ren Yang
Affiliation:
Department of Materials Science and Engineering, National Taiwan University, Taipei 10617, ROC
Makoto Shiojiri*
Affiliation:
Kyoto Institute of Technology, Kyoto 606-8585, Japan
*
* Present address: 1-297 Wakiyama, Kyoto 618-0091, Japan

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 1931 - 1932
Copyright
Copyright © Microscopy Society of America 2015 

References

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