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Structural Assessment of (Sub-)Monolayer Coatings in Device Processing at High Spatial Resolving Power by TOF-SIMS Tandem MS Imaging

Published online by Cambridge University Press:  05 August 2019

Gregory L. Fisher
Gregory L. Fisher*
Affiliation:
Physical Electronics, Chanhassen, Minnesota, USA.

Abstract

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Type
Microscopy and Microanalysis for Real-World Problem Solving
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 732 - 733
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Fisher, GL et al. , Anal. Chem. 88 (2016), p. 6433.Google Scholar
[2]Fisher, GL et al. , Microscop. Microanal. 23 (2017), p. 843.Google Scholar
[3]Chini, CE et al. , Biointerphases 13 (2018), p. 03B409.Google Scholar
[4]Fu, T et al. , Nature Sci. Rep. (2018) accepted December 06, 2018.Google Scholar
[5]Müller, R et al. , Chemistry (2018). doi: 10.1002/chem.201803966.Google Scholar
[6]R Müller and A Welle at Karlsruhe Institute of Technology (KIT) and C Barner-Kowollik at Queensland University of Technology (QUB) are acknowledged for providing the samples for analysis.Google Scholar