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Strain Measurements Using Nano-Beam Diffraction on a FE-STEM

Published online by Cambridge University Press:  05 August 2007

C Vartuli ,
K Jarausch ,
H Inada ,
R Tsuneta ,
D Dingley  and
E Marley
C Vartuli
Affiliation:
Texas Instruments
K Jarausch
Affiliation:
Hitachi High Technologies America
H Inada
Affiliation:
Hitachi High Technologies
R Tsuneta
Affiliation:
Hitachi Central Research Laboratories
D Dingley
Affiliation:
EBSD Consultants
E Marley
Affiliation:
Texas Instruments
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2007 in Ft. Lauderdale, Florida, USA, August 5 – August 9, 2007

Type
Research Article
Information
Microscopy and Microanalysis , Volume 13 , Issue S02 , August 2007 , pp. 836 - 837
Copyright
© 2007 Microscopy Society of America

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