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A STEM-based Path Towards Atomic-scale Silicon-based Devices

  • Bethany M. Hudak (a1), Stephen Jesse (a1) (a2), Jiaming Song (a3), Albina Borisevich (a1), Paul C. Snijders (a3), Sergei V. Kalinin (a1) (a2) and Andrew R. Lupini (a1) (a2)...
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Copyright

Corresponding author

*Corresponding authors: hudakbm@ornl.gov, arl1000@ornl.gov

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Present address: School of Physics, Northwest University, Xi'an, China

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References

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[1]Jesse, S et al. , Small 11 (2015), p. 5895.
[2]Jesse, S et al. , Nanotechnology 29 (2019), p. 255303.
[3]Susi, T et al. , Ultramicroscopy 180 (2017), p. 163.
[4]Dyck, O et al. , Applied Physics Letters 111 (2017), p. 113104.
[5]Hudak, BM et al. , ACS Nano 12 (2018), p. 5873.
[6]Celler, GK and Cristoloveanu, S, Journal of Applied Physics 93 (2003), p. 4955.
[7]Roberts, MM et al. , Nature Materials 5 (2006), p. 388.
[8]Scott, SA and Lagally, MG, Journal of Physics D 40 (2007), p. R75
[9]Research supported by Oak Ridge National Laboratory's (ORNL's) Center for Nanophase Materials Sciences, which is a U.S. Department of Energy (DOE) Office of Science User Facility (SJ, SVK), ORNL's Laboratory Directed Research and Development Programs, managed by UT-Battelle, LLC for the U.S. DOE (BMH, JS, PCS), and the U.S. DOE, Office of Science, Basic Energy Sciences, Division of Materials Sciences and Engineering (AB, ARL). This manuscript has been authored by UT-Battelle, LLC, under contract DE-AC05-00OR22725 with the US Department of Energy (DOE). The US government retains and the publisher, by accepting the article for publication, acknowledges that the US government retains a nonexclusive, paid-up, irrevocable, worldwide license to publish or reproduce the published form of this manuscript, or allow others to do so, for US government purposes. DOE will provide public access to these results of federally sponsored research in accordance with the DOE Public Access Plan (http://energy.gov/downloads/doe-public-access-plan).

A STEM-based Path Towards Atomic-scale Silicon-based Devices

  • Bethany M. Hudak (a1), Stephen Jesse (a1) (a2), Jiaming Song (a3), Albina Borisevich (a1), Paul C. Snijders (a3), Sergei V. Kalinin (a1) (a2) and Andrew R. Lupini (a1) (a2)...

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