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Sputtering of Organic Materials with a C60+ Ion Beam

Published online by Cambridge University Press:  01 August 2010

SR Bryan
Affiliation:
Physical Electronics
GL Fisher
Affiliation:
Physical Electronics
S Alnabulsi
Affiliation:
Physical Electronics
S Raman
Affiliation:
Physical Electronics
J Moulder
Affiliation:
Physical Electronics
JS Hammond
Affiliation:
Physical Electronics
N Sanada
Affiliation:
ULVAC-PHI, Japan
S-I Iida
Affiliation:
ULVAC-PHI, Japan

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Copyright
Copyright © Microscopy Society of America 2010