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Solving structure of the interfaces using atomic level energy dispersive x-ray spectroscopy

Published online by Cambridge University Press:  23 November 2012

D.O. Klenov
Affiliation:
FEI Company, Eindhoven, Netherlands
A. Carlsson
Affiliation:
FEI Company, Eindhoven, Netherlands
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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Copyright
Copyright © Microscopy Society of America 2012

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