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Site-Specific Lift-Out on Complicated Nanoscale Structures

Published online by Cambridge University Press:  22 July 2022

Yimeng Chen  and
Ty J. Prosa
Yimeng Chen*
Affiliation:
CAMECA Instruments Inc., Madison, WI 53711 USA
Ty J. Prosa
Affiliation:
CAMECA Instruments Inc., Madison, WI 53711 USA
*
*Corresponding author: Yimeng.Chen@ametek.com

Abstract

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Type
On Demand - Advances in Focused Ion Beam Instrumentation, Applications and Techniques in Materials and Life Sciences
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 92 - 93
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Copyright
Copyright © Microscopy Society of America 2022

References

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