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SIMS on FIB Instruments: a Powerful Tool for High-Resolution High-Sensitivity Nano-Analytics

Published online by Cambridge University Press:  23 September 2015

T. Wirtz ,
D. Dowsett ,
P. Philipp ,
J.-N. Audinot  and
S. Eswara Moorthy
T. Wirtz
Affiliation:
Advanced Instrumentation for Ion Nano-Analytics (AINA), Luxembourg Institute of Science and Technology, 41 rue du Brill, L-4422 Belvaux, Luxembourg
D. Dowsett
Affiliation:
Advanced Instrumentation for Ion Nano-Analytics (AINA), Luxembourg Institute of Science and Technology, 41 rue du Brill, L-4422 Belvaux, Luxembourg
P. Philipp
Affiliation:
Advanced Instrumentation for Ion Nano-Analytics (AINA), Luxembourg Institute of Science and Technology, 41 rue du Brill, L-4422 Belvaux, Luxembourg
J.-N. Audinot
Affiliation:
Advanced Instrumentation for Ion Nano-Analytics (AINA), Luxembourg Institute of Science and Technology, 41 rue du Brill, L-4422 Belvaux, Luxembourg
S. Eswara Moorthy
Affiliation:
Advanced Instrumentation for Ion Nano-Analytics (AINA), Luxembourg Institute of Science and Technology, 41 rue du Brill, L-4422 Belvaux, Luxembourg

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 2319 - 2320
Copyright
Copyright © Microscopy Society of America 2015 

References

[1] Philipp, P. et al., Int. J. Mass. Spectrom. 253 (2006) 71.Google Scholar
[2] Wirtz, T. et al., Appl. Phys. Lett. 101 (2012) 041601.Google Scholar
[3] Pillatsch, L. et al., Appl. Surf Sci. 282 (2013) 90.Google Scholar