Hostname: page-component-84b7d79bbc-g5fl4 Total loading time: 0 Render date: 2024-07-25T08:53:54.320Z Has data issue: false hasContentIssue false

Selective Detection of Backscattered Electrons in the Compound Lens Equipped UHR SEM

Published online by Cambridge University Press:  25 July 2016

Petr Wandrol
Affiliation:
FEI Company, Brno, Czech Republic
Radovan Vašina
Affiliation:
FEI Company, Brno, Czech Republic
Adrian Sandu
Affiliation:
FEI Company, Eindhoven, the Netherlands
Ernst Jan Vesseur
Affiliation:
FEI Company, Eindhoven, the Netherlands
Lubomir Tůma
Affiliation:
FEI Company, Brno, Czech Republic

Abstract

Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Copyright
© Microscopy Society of America 2016 

References

References:

[1] PdCeO2 sample courtesy of Dr. Alessandro Lavacchi, CNR ICCOM.Google Scholar
[2] Ag particles on polymer sample courtesy of the TE01020218 project team, Membrain.Google Scholar
[3] The authors acknowledge funding from the Technology Agency of the Czech Republic, TE01020118.Google Scholar