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Removal of Surface Damage from Focused Ion Beam using Plasma Cleaner

Published online by Cambridge University Press:  31 July 2006

D-S Ko ,
YM Park ,
S-D Kim  and
Y-W Kim
D-S Ko
Affiliation:
Seoul National University
YM Park
Affiliation:
Seoul National University
S-D Kim
Affiliation:
Seoul National University
Y-W Kim
Affiliation:
Seoul National University

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2005

Type
Abstract
Information
Microscopy and Microanalysis , Volume 12 , Issue S02 , August 2006 , pp. 1262 - 1263
Copyright
© 2006 Microscopy Society of America