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Refraction-Assisted Illumination for Infrared Imaging of Integrated Circuits

Published online by Cambridge University Press:  01 August 2010

S LaLumondiere  and
T Yeoh
S LaLumondiere
Affiliation:
The Aerospace Corporation
T Yeoh
Affiliation:
The Aerospace Corporation

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 16 , Supplement S2 , July 2010 , pp. 782 - 783
Copyright
Copyright © Microscopy Society of America 2010