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Precession Electron Diffraction (PED) Strain Measurements in Stacked Nanosheet Structures

Published online by Cambridge University Press:  05 August 2019

J Li ,
S Mochizuki ,
J Zhang ,
N Loubet ,
J Gaudiello  and
B Haran
J Li*
Affiliation:
IBM, Albany, NY, USA.
S Mochizuki
Affiliation:
IBM, Albany, NY, USA.
J Zhang
Affiliation:
IBM, Albany, NY, USA.
N Loubet
Affiliation:
IBM, Albany, NY, USA.
J Gaudiello
Affiliation:
IBM, Albany, NY, USA.
B Haran
Affiliation:
IBM, Albany, NY, USA.
*
*Corresponding author: juntaoli@us.ibm.com

Abstract

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Type
Microscopy and Spectroscopy of Nanoscale Materials for Energy Applications
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 2018 - 2019
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Ghani, T et al. , IEDM (2003), p. 1161.Google Scholar
[2]Reboh, S et al. , Appl. Phys. Lett. 112 (2018), p. 051901.Google Scholar
[3]This work was performed by the Research Alliance teams at various IBM Research and Development Facilities.Google Scholar