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Optimized FIB Sample Preparation for Atomic Resolution Analytical STEM at Low kV - A Key Requirement for Successful Application

Published online by Cambridge University Press:  08 April 2017

M Schaffer ,
B Schaffer ,
Q Ramasse ,
M Falke ,
D Abou-Ras ,
S Schmidt ,
R Caballero  and
K Marquardt
M Schaffer
Affiliation:
SuperSTEM, UK
B Schaffer
Affiliation:
SuperSTEM, UK
Q Ramasse
Affiliation:
SuperSTEM, UK
M Falke
Affiliation:
Bruker Nano GmbH, Germany
D Abou-Ras
Affiliation:
Helmholtz-Zentrum, Germany
S Schmidt
Affiliation:
Helmholtz-Zentrum, Germany
R Caballero
Affiliation:
Helmholtz-Zentrum, Germany
K Marquardt
Affiliation:
GFZ German Research Centre for Geosciences, Germany

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 17 , Supplement S2 , July 2011 , pp. 630 - 631
Copyright
Copyright © Microscopy Society of America 2011