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Optimization of 3D EBSD in a FIB-SEM System Using a Static Sample Setup

Published online by Cambridge University Press:  23 September 2015

Julien Guyon ,
Nathalie Gey ,
Daniel Goran ,
Smail Chalal  and
Fabian Perez-Willard
Julien Guyon
Affiliation:
Laboratoire d'Etude des Microstructures et de Mecanique des Materiaux, LEM3, CNRS ISGMP, Universite de Lorraine, F-57045 Metz Cedex 01, France Laboratory of Excellence on Design of Alloy Metals for low-mAss Structures ('LabEx DAMAS'), Universite de Lorraine, France
Nathalie Gey
Affiliation:
Laboratoire d'Etude des Microstructures et de Mecanique des Materiaux, LEM3, CNRS ISGMP, Universite de Lorraine, F-57045 Metz Cedex 01, France Laboratory of Excellence on Design of Alloy Metals for low-mAss Structures ('LabEx DAMAS'), Universite de Lorraine, France
Daniel Goran
Affiliation:
Bruker Nano GmbH, Am Studio 2D, 12489 Berlin, Germany
Smail Chalal
Affiliation:
Carl Zeiss Microscopy GmbH, Carl-Zeiss Str. 56, 73447 Oberkochen, Germany
Fabian Perez-Willard
Affiliation:
Carl Zeiss Microscopy GmbH, Carl-Zeiss Str. 56, 73447 Oberkochen, Germany

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 2035 - 2036
Copyright
Copyright © Microscopy Society of America 2015 

References

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[5] Groeber, M. A. & Jackson, M. A., Integr. Mater. Manuf. Innov (2014) 3, 5.CrossRefGoogle Scholar