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Optical Modulator P/N Junction Mapping by Electron Holography and Scanning Capacitance Microscopy

Published online by Cambridge University Press:  01 August 2018

Y. Y. Wang
Affiliation:
GlobalFoundires Inc., Hopewell Junction, NY, USA
J. Nxumalo
Affiliation:
GlobalFoundires Inc., Hopewell Junction, NY, USA
J. Jeon
Affiliation:
GlobalFoundires Inc., Hopewell Junction, NY, USA
K. Barton
Affiliation:
GlobalFoundires Inc., Hopewell Junction, NY, USA
K. Nummy
Affiliation:
GlobalFoundires Inc., Hopewell Junction, NY, USA

Abstract

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Type
Abstract
Copyright
© Microscopy Society of America 2018 

References

[1] Rau, W. D., et al, Phys. Rev. Lett. 82 1999) p. 2614.Google Scholar
[2] Wang, Y. Y., et al, Ultrarmcroscopy 101 2004) p. 63.Google Scholar
[3] Wang, Y. Y., et al, Ultramicroscopy 124 2013) p. 117.Google Scholar
[4] Williams, C. C., et al, J. Vac. Sci. Technol. A 8 1990) p. 895.Google Scholar
[5] Sze, M. Physics of Semiconductor Devices, Second Edition.Google Scholar
[6] Gardes, F., et al, Proc. of SPIE 7608 2010) p. 76080J1.Google Scholar
[7] We would like to thank GlobalFoundries managers, E. Crawford and A. Katnani, for their support of this work.Google Scholar