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O+ PFIB Milling and Measurement of FIB Damage in Silicon

Published online by Cambridge University Press:  30 July 2020

Brandon van Leer  and
Lee Casalena
Brandon van Leer
Affiliation:
ThermoFisher Scientific, Hillsboro, Oregon, United States
Lee Casalena
Affiliation:
ThermoFisher Scientific, Hillsboro, Oregon, United States

Abstract

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Type
FIB-SEM Technology and Electron Tomography for Materials Science and Engineering
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 414 - 415
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Copyright
Copyright © Microscopy Society of America 2020

References

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Van Leer, B. et al. , Microscopy and Microanalysis 25 (Suppl 2), (2019).Google Scholar
Ziegler, J.F. and Biersack, J.P., SRIM 2003, www.SRIM.comGoogle Scholar