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New High-Resolution Low-Voltage and High Performance Analytical FIB/SEM System

Published online by Cambridge University Press:  27 August 2014

Jaroslav Jiruše ,
Miloslav Havelka ,
Martin Haničinec ,
Jan Polster  and
Tomáš Hrnčíř
Jaroslav Jiruše
Affiliation:
TESCAN Brno, s.r.o., Libušina třída 1, Brno, Czech Republic
Miloslav Havelka
Affiliation:
TESCAN Brno, s.r.o., Libušina třída 1, Brno, Czech Republic
Martin Haničinec
Affiliation:
TESCAN Brno, s.r.o., Libušina třída 1, Brno, Czech Republic
Jan Polster
Affiliation:
TESCAN Brno, s.r.o., Libušina třída 1, Brno, Czech Republic
Tomáš Hrnčíř
Affiliation:
TESCAN Brno, s.r.o., Libušina třída 1, Brno, Czech Republic

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 1104 - 1105
Copyright
Copyright © Microscopy Society of America 2014 

References

[1] Shao, Z., Lin, PSD, Sci., Rev. Instrum. 60 (1989), p. 3434.Google Scholar
[2] Jiruse, J., et al., Microsc. Microanal. 19 (Suppl 2) (2013), p. 1302.Google Scholar
[3] Delobbe, A., Salord, O. and Sudraud, P. EFUG meeting (2011).Google Scholar
[4] The research leading to these results has received funding from the European Union Seventh Framework Program [FP7/2007-2013] under grant agreement n°280566, project UnivSEM.Google Scholar