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New Concepts for 3D Optics in X-ray Microscopy

Published online by Cambridge University Press:  10 August 2018

Umut Tunca Sanli
Affiliation:
Modern Magnetic Systems Department, Max Planck Institute for Intelligent Systems, Stuttgart70569, Germany
Hakan Ceylan
Affiliation:
Physical Intelligence Department, Max Planck Institute for Intelligent Systems, Stuttgart70569, Germany
Chengge Jiao
Affiliation:
Thermo Fisher Scientific, 5651 GGEindhoven, The Netherlands
Margarita Baluktsian
Affiliation:
Modern Magnetic Systems Department, Max Planck Institute for Intelligent Systems, Stuttgart70569, Germany
Corinne Grevent
Affiliation:
Modern Magnetic Systems Department, Max Planck Institute for Intelligent Systems, Stuttgart70569, Germany
Kersten Hahn
Affiliation:
Stuttgart Center for Electron Microscopy, Max Planck Institute for Solid State Research, Stuttgart70569, Germany
Yi Wang
Affiliation:
Stuttgart Center for Electron Microscopy, Max Planck Institute for Solid State Research, Stuttgart70569, Germany
Vesna Srot
Affiliation:
Stuttgart Center for Electron Microscopy, Max Planck Institute for Solid State Research, Stuttgart70569, Germany
Gunther Richter
Affiliation:
Modern Magnetic Systems Department, Max Planck Institute for Intelligent Systems, Stuttgart70569, Germany
Iuliia Bykova
Affiliation:
Modern Magnetic Systems Department, Max Planck Institute for Intelligent Systems, Stuttgart70569, Germany
Markus Weigand
Affiliation:
Modern Magnetic Systems Department, Max Planck Institute for Intelligent Systems, Stuttgart70569, Germany
Metin Sitti
Affiliation:
Physical Intelligence Department, Max Planck Institute for Intelligent Systems, Stuttgart70569, Germany
Gisela Schütz
Affiliation:
Modern Magnetic Systems Department, Max Planck Institute for Intelligent Systems, Stuttgart70569, Germany
Kahraman Keskinbora*
Affiliation:
Modern Magnetic Systems Department, Max Planck Institute for Intelligent Systems, Stuttgart70569, Germany
*
* Corresponding author: keskinbora@is.mpg.de

Abstract

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Abstract
Copyright
© Microscopy Society of America 2018 

References

[1] Schropp, A. Schroer, C. G. Dose requirements for resolving a given feature in an object by coherent x-ray diffraction imaging. New J. Phys. 12 2010 035016.CrossRefGoogle Scholar
[2] Keskinbora, K., et al. Rapid Prototyping of Fresnel Zone Plates via Direct Ga+ Ion Beam Lithography for High-Resolution X-ray Imaging. ACS Nano 7, 97889797, 2013.CrossRefGoogle ScholarPubMed
[3] Sanli, U. T., et al "High-resolution high-efficiency multilayer Fresnel zone plates for soft and hard x-rays." X-Ray Nanoimaging: Instruments and Methods II. Vol. 9592 International Society for Optics and Photonics 2015.Google Scholar
[4] Sanli, U. T., et al "Overview of the multilayer-Fresnel zone plate and the kinoform lens development at MPI for Intelligent Systems.". EUV and X-ray Optics: Synergy between Laboratory and Space IV Vol. 9510, International Society for Optics and Photonics 2015.Google Scholar
[5] Keskinbora, K., et al Multilayer Fresnel zone plates for high energy radiation resolve 21 nm features at 1.2 keV. Opt. Express 22, 1844018453, 2014.CrossRefGoogle ScholarPubMed
[6] Sanli, U. T., et al 3D Nanofabrication of High-resolution Multilayer Fresnel Zone Plates. Adv. Sci. (DOI: 10.1002/advs.201800346 2018.Google ScholarPubMed
[7] Keskinbora, K., et al Single-Step 3D Nanofabrication of Kinoform Optics via Gray-Scale Focused Ion Beam Lithography for Efficient X-Ray Focusing. Adv. Opt. Mater. 3 2015) p. 792800.CrossRefGoogle Scholar
[8] Sanli, U. T., et al. 3D Nano-printed Plastic Kinoform X-ray Optics. Under Revision. (2018).Google Scholar
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