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Nanoparticle Temperature Measurements for MEMS Heater Calibration

Published online by Cambridge University Press:  30 July 2020

Matthew Mecklenburg ,
B. C. Regan  and
William Hubbard
Matthew Mecklenburg
Affiliation:
University of Southern California, Los Angeles, California, United States
B. C. Regan
Affiliation:
UCLA Department of Physics & Astronomy, Los Angeles, California, United States
William Hubbard
Affiliation:
NanoElectronic Imaging, Inc., Los Angeles, California, United States

Abstract

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Type
Pushing the Limits of Detection in Quantitative (S)TEM Imaging, EELS, and EDX
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 1226 - 1227
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Copyright
Copyright © Microscopy Society of America 2020

References

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This material is based upon work supported by the Defense Microelectronics Activity under Contract No. HQ072720P0004.Google Scholar