Hostname: page-component-8448b6f56d-cfpbc Total loading time: 0 Render date: 2024-04-23T10:01:40.257Z Has data issue: false hasContentIssue false

Nanofabrication by 3D E-beam Cutting

Published online by Cambridge University Press:  03 August 2008

T Gnanavel
Affiliation:
University of Sheffield, United Kingdom
Z Saghi
Affiliation:
University of Sheffield, United Kingdom
Y Peng
Affiliation:
University of Sheffield, United Kingdom
G Möbus
Affiliation:
University of Sheffield, United Kingdom
Get access

Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Copyright
© 2008 Microscopy Society of America

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)