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Multilayered Cr(Al)N/SiOx Nanocomposite Coatings Fabricated by Differential Pumping Cosputtering

Published online by Cambridge University Press:  27 August 2014

Masahiro Kawasaki ,
Masateru Nose ,
Ichiro Onishi  and
Makoto Shiojiri
Masahiro Kawasaki
Affiliation:
JEOL USA Inc., 11 Dearborn Road, Peabody, MA 01960, USA
Masateru Nose
Affiliation:
Faculty of Art and Design, University of Toyama, Takaoka, Toyama 933-8588, Japan
Ichiro Onishi
Affiliation:
JEOL Ltd. 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan
Makoto Shiojiri
Affiliation:
Kyoto Institute of Technology, Kyoto 606-8585, Japan

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 1924 - 1925
Copyright
Copyright © Microscopy Society of America 2014 

References

[1] Nose, M., et al, J. Vac. Sci. Technol. A 30 (2012) 011502.Google Scholar
[2] Kawasaki, M., et al, ACS Appl. Mater. Interfaces 5 (2013) 3833.Google Scholar
[3] Kawasaki, M., et al, Appl. Phys. Lett. 103 (2013) 201913.Google Scholar
[4] Kawasaki, M., et al, Appl. Phys. Lett. 102 (2013) 091603.Google Scholar