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Movement and Imaging of Single-Atom Dopants in Silicon

Published online by Cambridge University Press:  04 August 2017

Bethany M. Hudak ,
Jiaming Song ,
Paul C. Snijders  and
Andrew R. Lupini
Bethany M. Hudak
Affiliation:
Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN, USA
Jiaming Song
Affiliation:
Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN, USA
Paul C. Snijders
Affiliation:
Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN, USA
Andrew R. Lupini
Affiliation:
Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN, USA

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 1706 - 1707
Copyright
© Microscopy Society of America 2017 

References

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[6] Research sponsored by the Laboratory Directed Research and Development Program of Oak Ridge National Laboratory, managed by UT-Battelle, LLC, for the U. S. Department of Energy.Google Scholar