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MiniSEM with Carbon Nanotube Electron Source and Electrostatic Lens

Published online by Cambridge University Press:  05 August 2007

BC Yao ,
SC Tseng  and
CH Tsai
BC Yao
Affiliation:
Industrial Technology Research Institute,Taiwan
SC Tseng
Affiliation:
Industrial Technology Research Institute,Taiwan
CH Tsai
Affiliation:
National Tsing Hua University,Taiwan
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2007 in Ft. Lauderdale, Florida, USA, August 5 – August 9, 2007

Type
Research Article
Information
Microscopy and Microanalysis , Volume 13 , Issue S02 , August 2007 , pp. 586 - 587
Copyright
© 2007 Microscopy Society of America

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