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Micromachining of Si3N4by Ga+-Ion Implantation and Dry Etching

Published online by Cambridge University Press:  25 July 2016

Margarita Baluktsian ,
Kahraman Keskinbora ,
Umut T. Sanli  and
Gisela Schütz
Margarita Baluktsian
Affiliation:
Max Planck Institute for Intelligent Systems, Dept. Modern Magnetic Systems, Stuttgart, Germany
Kahraman Keskinbora
Affiliation:
Max Planck Institute for Intelligent Systems, Dept. Modern Magnetic Systems, Stuttgart, Germany
Umut T. Sanli
Affiliation:
Max Planck Institute for Intelligent Systems, Dept. Modern Magnetic Systems, Stuttgart, Germany
Gisela Schütz
Affiliation:
Max Planck Institute for Intelligent Systems, Dept. Modern Magnetic Systems, Stuttgart, Germany

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 170 - 171
Copyright
© Microscopy Society of America 2016 

References

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