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MEMS Stage and Piezoelectric Motor-controlled TEM Holder for Quantitative in-situ Testing of Thin Film Specimens

Published online by Cambridge University Press:  01 August 2002

Scott J. Robinson ,
Glenn Fried  and
Aman Haque
Scott J. Robinson
Affiliation:
Microscopy Suite, Imaging Technology Group, Beckman Institute for Advanced Science and Technology, 405 North Mathews Avenue, Urbana IL 61801, USA
Glenn Fried
Affiliation:
Microscopy Suite, Imaging Technology Group, Beckman Institute for Advanced Science and Technology, 405 North Mathews Avenue, Urbana IL 61801, USA
Aman Haque
Affiliation:
Microscopy Suite, Imaging Technology Group, Beckman Institute for Advanced Science and Technology, 405 North Mathews Avenue, Urbana IL 61801, USA

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 1274 - 1275
Copyright
Copyright © Microscopy Society of America 2002