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Measurement of the Electron Beam Point Spread Function (PSF) in a Scanning Electron Microscope (SEM)

Published online by Cambridge University Press:  23 September 2015

Yudhishthir P. Kandel ,
Matthew D. Zotta ,
Andrew N. Caferra ,
Richard Moore  and
Eric Lifshin
Yudhishthir P. Kandel
Affiliation:
College of Nanoscale Science and Engineering, SUNY Polytechnic Institute, Albany, NY, USA
Matthew D. Zotta
Affiliation:
College of Nanoscale Science and Engineering, SUNY Polytechnic Institute, Albany, NY, USA
Andrew N. Caferra
Affiliation:
College of Nanoscale Science and Engineering, SUNY Polytechnic Institute, Albany, NY, USA
Richard Moore
Affiliation:
Nanojehm Inc. Albany, NY, USA
Eric Lifshin
Affiliation:
College of Nanoscale Science and Engineering, SUNY Polytechnic Institute, Albany, NY, USA

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 699 - 700
Copyright
Copyright © Microscopy Society of America 2015 

References

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