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Measurement of Elemental Composition of FeNi and SiGe Thin Films by Electron Probe Microanalysis with Stratagem Software

Published online by Cambridge University Press:  01 August 2018

Vasile-Dan Hodoroaba  and
Kyung Joong Kim
Vasile-Dan Hodoroaba
Affiliation:
Federal Institute for Materials Research and Testing (BAM), Division 6.1 Surface Analysis and Interfacial Chemistry, Berlin, Germany
Kyung Joong Kim
Affiliation:
Korea Research Institute of Standards and Science (KRISS), Division of Industrial Metrology, Daejeon, Korea

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 758 - 759
Copyright
© Microscopy Society of America 2018 

References

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[3] Kiihn, J, et al, Surf Interface Anal 44 2012) p. 1456.Google Scholar
[4] Stratagem Version 6.7, SAMx, 1554 route de la Roquette, 06670 Levens - France.Google Scholar
[5] Ortel, E, et al, Anal Chem 88 2016) p. 7083.Google Scholar
[6] Oh, WJ, et al, Appl Surf Sci 432 2018) p. 72.Google Scholar