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Low Voltage Soft X-ray Emission Analysis from 100 V for Depth Chemical Information from a few nm to several hundred nm

Published online by Cambridge University Press:  25 July 2016

H. Takahashi
Affiliation:
JEOL Ltd., 1-2 Musashino, 3-chome, Akishima, Tokyo, Japan
S. Asahina
Affiliation:
JEOL Ltd., 1-2 Musashino, 3-chome, Akishima, Tokyo, Japan
Y. Yamamoto
Affiliation:
JEOL Ltd., 1-2 Musashino, 3-chome, Akishima, Tokyo, Japan
Y. Sakuda
Affiliation:
JEOL Ltd., 1-2 Musashino, 3-chome, Akishima, Tokyo, Japan
T. Kanazawa
Affiliation:
JEOL Ltd., 1-2 Musashino, 3-chome, Akishima, Tokyo, Japan
M. Terauchi
Affiliation:
Institute for Multidisciplinary Research for Advanced Materials, Tohoku University, Sendai, Japan
V. Robertson
Affiliation:
JEOL USA, 11 Dearborn Rd. Peabody, MA, USA
P. McSwiggen
Affiliation:
JEOL USA, 11 Dearborn Rd. Peabody, MA, USA
C. Dickinson
Affiliation:
JEOL (UK) Ltd, JEOL House, Welwyn Garden City, Herts, United Kingdom
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Abstract

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Copyright
© Microscopy Society of America 2016 

References

[1] Terauchi, M., et al., J. Electron Microscopy 61, 1 (2012).CrossRefGoogle Scholar
[2] Takahashi, H., et al., Microscopy and Microanalysis 20(supple. 3) 684 (2014).CrossRefGoogle Scholar
[3] Terasaki, O, et al., JEOL News 48, 2131, 2013.Google Scholar
[4] Suga, M., et al., accepted to Progress in Solid State Chemistry.Google Scholar
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Low Voltage Soft X-ray Emission Analysis from 100 V for Depth Chemical Information from a few nm to several hundred nm
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Low Voltage Soft X-ray Emission Analysis from 100 V for Depth Chemical Information from a few nm to several hundred nm
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Low Voltage Soft X-ray Emission Analysis from 100 V for Depth Chemical Information from a few nm to several hundred nm
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