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Low Energy 500 eV Focused Argon Ion Beam Provided by Multi-Ions Species Plasma FIB for Material Science Sample Preparations

Published online by Cambridge University Press:  30 July 2021

Chengge Jiao ,
Jeremy Graham ,
Xu Xu ,
Timothy Burnett  and
Brandon van Leer
Chengge Jiao
Affiliation:
Thermo Fisher Scientific, Eindhoven, Netherlands
Jeremy Graham
Affiliation:
Thermo Fisher scientific, Hillsboro, Oregon, United States
Xu Xu
Affiliation:
The University of Manchester, Manchester, United Kingdom
Timothy Burnett
Affiliation:
The University of Manchester, Manchester, United Kingdom
Brandon van Leer
Affiliation:
Thermo Fisher Scientific, Hillsboro, Oregon, United States

Abstract

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Type
Advances in Focused Ion Beam Instrumentation, Applications and Techniques in and Materials and Life Sciences
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 20 - 22
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Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

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