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Local Measurement and Computational Refinement of Aberrations for HRTEM

  • Angus I. Kirkland (a1), Rüdiger R. Meyer (a1) and Lan-Yun Shery Chang (a1)

Abstract

Methods for accurate and automated determination of the coefficients of the wave aberration function are compared with particular emphasis on measurements of higher order coefficients in corrected instruments. Experimental applications of aberration measurement to the determination of illumination isoplanicity and high precision local refinement of restored exit waves are also described.

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Corresponding author

Corresponding author. E-mail: angus.kirkland@materials.ox.ac.uk

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Keywords

Local Measurement and Computational Refinement of Aberrations for HRTEM

  • Angus I. Kirkland (a1), Rüdiger R. Meyer (a1) and Lan-Yun Shery Chang (a1)

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