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Local Electrode Atom Probes

Published online by Cambridge University Press:  02 July 2020

Thomas F. Kelly
Affiliation:
Department of Materials Science and Engineering, University of Wisconsin, Madison, WI, USA53706
Patrick P. Camus
Affiliation:
Department of Materials Science and Engineering, University of Wisconsin, Madison, WI, USA53706
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Extract

The Need for Improvements. Though atom probe techniques have impressive atomic-scale analytical capabilities, there are some definite needs for improvement. The needle shape of APFIM specimens is a difficult geometry to make for many types of materials, especially technologically important thin-film materials. Even though 3DAPs collect more data than traditional APs, the analysis volumes are still small by analytical standards: typically there are fewer than 1 million atoms in an image which is about 15nm x 15nm x 50nm. The data collection rate (up to tens of atoms per second) limits the practical size of analyzed volumes to about 1 million atoms. Poor mass resolution makes it difficult to separate ions of similar mass-to-charge ratio in spectra of approximately 20% of samples. Thus, there are three principal areas where improvements are desirable: 1) specimen geometry, 2) data collection rates, and 3) mass resolving power.

Type
Imaging and Analysis at the Atomic Level: 30 Years of Atom Probe Field Ion Microscopy
Copyright
Copyright © Microscopy Society of America

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References

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