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Investigation of Electron Beam Deposition Parameters Within a Scanning Electron Microscope

Published online by Cambridge University Press:  01 August 2018

William Kellogg ,
Benjamin D. Myers ,
Karl Hujsak  and
Vinayak P. Dravid
William Kellogg
Affiliation:
Department of Materials Science & Engineering, Northwestern University, Evanston, IL.
Benjamin D. Myers
Affiliation:
Department of Materials Science & Engineering, Northwestern University, Evanston, IL. NUANCE Center, Northwestern University, Evanston, IL.
Karl Hujsak
Affiliation:
Department of Materials Science & Engineering, Northwestern University, Evanston, IL.
Vinayak P. Dravid
Affiliation:
Department of Materials Science & Engineering, Northwestern University, Evanston, IL. NUANCE Center, Northwestern University, Evanston, IL.

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 278 - 279
Copyright
© Microscopy Society of America 2018 

References

References:

[1] Unocic, R. R., et al, Nanoscale 8 2016) p. 15581.Google Scholar
[2] Abellan, P., et al, Langmuir 36 2016) p. 1468.Google Scholar
[3] Donev, E. U., et al, Nanoscale 3 2011) p. 2709.Google Scholar
[4] Esfandiarpour, S., Boehme, L. Hastings, J. T. Nanotechnology 28 2017 125301.Google Scholar
[5] This work was sponsored by the Air Force Research laboratory under agreement number FA8650-15-2-5518 and the Air Force Office of Scientific Research under Award FA9550-12-1-0280. This work made use of the EPIC facility of Northwestern University's NUANCE Center, which has received support from the Soft and Hybrid Nanotechnology Experimental (SHyNE) Resource (NSF ECCS-1542205); the MRSEC program (NSF DMR-1121262) at the Materials Research Center; the International Institute for Nanotechnology (IIN); the Keck Foundation; and the State of Illinois, through the IIN.Google Scholar