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Investigation of Electron Beam Deposition Parameters Within a Scanning Electron Microscope

  • William Kellogg (a1), Benjamin D. Myers (a1) (a2), Karl Hujsak (a1) and Vinayak P. Dravid (a1) (a2)
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[1] Unocic, R. R., et al, Nanoscale 8 2016) p. 15581.
[2] Abellan, P., et al, Langmuir 36 2016) p. 1468.
[3] Donev, E. U., et al, Nanoscale 3 2011) p. 2709.
[4] Esfandiarpour, S., Boehme, L. Hastings, J. T. Nanotechnology 28 2017 125301.
[5] This work was sponsored by the Air Force Research laboratory under agreement number FA8650-15-2-5518 and the Air Force Office of Scientific Research under Award FA9550-12-1-0280. This work made use of the EPIC facility of Northwestern University's NUANCE Center, which has received support from the Soft and Hybrid Nanotechnology Experimental (SHyNE) Resource (NSF ECCS-1542205); the MRSEC program (NSF DMR-1121262) at the Materials Research Center; the International Institute for Nanotechnology (IIN); the Keck Foundation; and the State of Illinois, through the IIN.

Investigation of Electron Beam Deposition Parameters Within a Scanning Electron Microscope

  • William Kellogg (a1), Benjamin D. Myers (a1) (a2), Karl Hujsak (a1) and Vinayak P. Dravid (a1) (a2)

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