Hostname: page-component-8448b6f56d-mp689 Total loading time: 0 Render date: 2024-04-19T19:07:50.858Z Has data issue: false hasContentIssue false
  • English
  • Français

Integration of Functional Epitaxial Oxides into Silicon: A TEM Investigation

Published online by Cambridge University Press:  07 September 2007

E Bugiel ,
A Fissel ,
M Czernohorsky ,
A Laha  and
H J Osten
E Bugiel
Affiliation:
Leibniz University of Hannover,Germany
A Fissel
Affiliation:
Leibniz University of Hannover,Germany
M Czernohorsky
Affiliation:
Leibniz University of Hannover,Germany
A Laha
Affiliation:
Leibniz University of Hannover,Germany
H J Osten
Affiliation:
Leibniz University of Hannover,Germany
Get access

Extract

Extended abstract of a paper presented at MC 2007, 33rd DGE Conference in Saarbrücken, Germany, September 2 – September 7, 2007

Type
Research Article
Information
Microscopy and Microanalysis , Volume 13 , Issue S03 , September 2007 , pp. 304 - 305
Copyright
Copyright © Microscopy Society of America 2007

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)