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Inspection Tool for Testing an Electron Beam in an Electromagnetic Lens System

Published online by Cambridge University Press:  04 August 2017

Cheolsu Han ,
Jong-Man Jeong ,
Sang-Chul Lee  and
Jin-Gyu Kim
Cheolsu Han
Affiliation:
Electron Microscopy Research Center, Korea Basic Science Institute, Daejeon, Republic of Korea.
Jong-Man Jeong
Affiliation:
Electron Microscopy Research Center, Korea Basic Science Institute, Daejeon, Republic of Korea.
Jin-Gyu Kim
Affiliation:
Division of Environmental and Material Sciences, Korea Basic Science Institute, Daejeon, Republic of Korea.

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 518 - 519
Copyright
© Microscopy Society of America 2017 

References

[1] Munro, E. in Handbook of Charged Particle optics, 1st ed CRC press NY 1997). Ch. I..Google Scholar
[2] Williams, David B., et al in Transmission Electron Microscopy: A Textbook for Materials Science. Springer 2009). Ch. 9.CrossRefGoogle Scholar
[3] Han, C., et al, Rev.Sci.Instrum. 88 2017). p. 023302.Google Scholar
[4] John, T. L. Thong in "ELECTRON BEAM TESTING TECHNOLOGY,". Plenum Press NY 1993.Google Scholar
[5] The authors acknowledge funding from Korea Basic Science Institute, Grant Number D36612.Google Scholar