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Inspection Tool for Testing an Electron Beam in an Electromagnetic Lens System

  • Cheolsu Han (a1), Jong-Man Jeong (a1), Sang-Chul Lee and Jin-Gyu Kim (a2)
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Abstract

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References

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[1] Munro, E. in Handbook of Charged Particle optics, 1st ed CRC press NY 1997). Ch. I..
[2] Williams, David B., et al in Transmission Electron Microscopy: A Textbook for Materials Science. Springer 2009). Ch. 9.
[3] Han, C., et al, Rev.Sci.Instrum. 88 2017). p. 023302.
[4] John, T. L. Thong in "ELECTRON BEAM TESTING TECHNOLOGY,". Plenum Press NY 1993.
[5] The authors acknowledge funding from Korea Basic Science Institute, Grant Number D36612.

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