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In-situ Observation of Structural Change and Failure Detection for Electrically Active Devices in TEM

Published online by Cambridge University Press:  05 August 2007

Y-W Kim
Affiliation:
Seoul National University,Korea
D-S Ko
Affiliation:
Seoul National University,Korea
S-D Kim
Affiliation:
Seoul National University,Korea
XS Li
Affiliation:
Samsung Advanced Institute of Technology,Korea
GS Park
Affiliation:
Samsung Advanced Institute of Technology,Korea
YK Kim
Affiliation:
National Center for Manomaterials Technology,Korea
CG Park
Affiliation:
National Center for Manomaterials Technology,Korea
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2007 in Ft. Lauderdale, Florida, USA, August 5 – August 9, 2007

Type
Research Article
Copyright
© 2007 Microscopy Society of America

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