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In-situ Fracture Toughness of Single Crystal Silicon Double-Cantilever Beams

Published online by Cambridge University Press:  22 July 2022

Sara M. Dickens ,
Frank W. DelRio ,
Scott J. Grutzik ,
William M. Mook ,
Brad L. Boyce ,
Eric Hintsala ,
Douglas Stauffer  and
Robert F. Cook
Sara M. Dickens
Affiliation:
Sandia National Laboratories, Albuquerque, NM, USA
Frank W. DelRio
Affiliation:
Sandia National Laboratories, Albuquerque, NM, USA
Scott J. Grutzik
Affiliation:
Sandia National Laboratories, Albuquerque, NM, USA
William M. Mook
Affiliation:
Sandia National Laboratories, Albuquerque, NM, USA
Brad L. Boyce
Affiliation:
Sandia National Laboratories, Albuquerque, NM, USA
Eric Hintsala
Affiliation:
Bruker Nano Surfaces, Eden Prairie, MN, USA
Douglas Stauffer
Affiliation:
Bruker Nano Surfaces, Eden Prairie, MN, USA
Robert F. Cook
Affiliation:
Independent Scientist, Winterville, NC, USA

Abstract

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Type
Advances in Focused Ion Beam Instrumentation, Applications and Techniques in Materials and Life Sciences
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 14 - 15
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Copyright
Copyright © Microscopy Society of America 2022

References

Jaya, BN, Kirchlechner, C and Dehm, G, J. Mater. Res. 30 (2015), p. 686.CrossRefGoogle Scholar
Hintsala, ED et al. , Scr. Mater. 130 (2017), p. 78.CrossRefGoogle Scholar
This paper describes objective technical results and analysis. Any subjective views or opinions that might be expressed in the paper do not necessarily represent the views of the U.S. Department of Energy or the United States Government. Sandia National Laboratories is a multimission laboratory managed and operated by National Technology and Engineering Solutions of Sandia, LLC., a wholly owned subsidiary of Honeywell International, Inc., for the U.S. Department of Energy's National Nuclear Security Administration under contract DE-NA-0003525 SAND2022-2060 AGoogle Scholar