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Insights into Texture and Phase Coexistence in Polycrystalline and Polyphasic Ferroelectric HfO2 Thin Films using 4D-STEM

  • Everett D. Grimley (a1), Sam Frisone (a1), Tony Schenk (a2), Min Hyuk Park (a2), Chris M. Fancher (a3), Thomas Mikolajick (a2), Jacob L. Jones (a1), Uwe Schroeder (a2) and James M. LeBeau (a1)...
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      Insights into Texture and Phase Coexistence in Polycrystalline and Polyphasic Ferroelectric HfO2 Thin Films using 4D-STEM
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References

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[1] Boscke, T. S., et al, Applied Physics Letters 99 2011) p. 102903.
[2] Katayama, K., et al, Journal of Applied Physics 119 2016) p. 134101.
[3] Grimley, E. D., et al, Advanced Materials Interfaces 2018) p. 1701258.
[4] Materlik, R., Kunneth, C. Kersch, A. Journal of Applied Physics 117 2015) p. 134109.
[5] Batra, R., Tan, H. D. Ramprasad, R. Applied Physics Letters 108 2016) p. 172902.
[6] Tate, M. W., et al, Microscopy and Microanalysis 22 2016) p. 237.
[7] EDG and JML acknowledge support from the National Science Foundation (NSF) DMR-1350273. EDG acknowledges support from the NSF Graduate Research Fellowship Program (DGE-1252376). Work was performed in part at the Analytical Instrumentation Facility (a member of RTNN, a site of NNCI) at NCSU, which is supported by the State of NC and the NSF (award number ECCS-1542015).

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