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Imaging Single Dopant Atoms and Nanoclusters in Highly n-type Bulk Si

Published online by Cambridge University Press:  01 August 2002

P. M. Voyles ,
D. A. Muller ,
J. L. Grazul ,
P. H. Citrin  and
H-J. L. Gossmann
P. M. Voyles
Affiliation:
Bell Labs, Lucent Technologies, 700 Mountain Ave, Murray Hill NJ 07974-0636
D. A. Muller
Affiliation:
Bell Labs, Lucent Technologies, 700 Mountain Ave, Murray Hill NJ 07974-0636
J. L. Grazul
Affiliation:
Bell Labs, Lucent Technologies, 700 Mountain Ave, Murray Hill NJ 07974-0636
P. H. Citrin
Affiliation:
Bell Labs, Lucent Technologies, 700 Mountain Ave, Murray Hill NJ 07974-0636
H-J. L. Gossmann
Affiliation:
Agere Systems, 700 Mountain Ave, Murray Hill, NJ 07974-0636

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 1614 - 1615
Copyright
Copyright © Microscopy Society of America 2002